Invention Grant
- Patent Title: Dual wafer stage switching system for a lithography machine
- Patent Title (中): 用于光刻机的双晶片级切换系统
-
Application No.: US14009289Application Date: 2012-03-23
-
Publication No.: US09547245B2Publication Date: 2017-01-17
- Inventor: Yu Zhu , Yaying Chen , Ming Zhang , Dengfeng Xu , Jinsong Wang
- Applicant: Yu Zhu , Yaying Chen , Ming Zhang , Dengfeng Xu , Jinsong Wang
- Applicant Address: CN
- Assignee: TSINGHUA UNIVERSITY
- Current Assignee: TSINGHUA UNIVERSITY
- Current Assignee Address: CN
- Agency: Hauptman Ham, LLP
- Priority: CN201110082729 20110401
- International Application: PCT/CN2012/072974 WO 20120323
- International Announcement: WO2012/130108 WO 20121004
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20

Abstract:
Disclosed is a dual wafer stage switching system for a lithography machine. The system comprises a base stage (30), a wafer stage (16.1) running at a pre-processing workstation, and a wafer stage (16.2) running at an exposure workstation. A rotating motor (41) is mounted under the base stage (30) for rotating the two wafer stages after the wafer stages have completed pre-processing and exposure operations in order to complete position switch of the wafer stages, wherein the base stage (30) is kept stationary during the switch. The present invention avoids rotation of a large inertia base stage and has low requirement for motor power, while eliminating a guide rail docking device and an auxiliary device and greatly simplifying system configuration. The system is easy and convenient to operate and easy to control.
Public/Granted literature
- US20140071422A1 DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE Public/Granted day:2014-03-13
Information query