Invention Grant
- Patent Title: Methods of fabricating an F-RAM
- Patent Title (中): 制造F-RAM的方法
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Application No.: US14109045Application Date: 2013-12-17
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Publication No.: US09548348B2Publication Date: 2017-01-17
- Inventor: Shan Sun , Krishnaswamy Ramkumar , Thomas Davenport , Kedar Patel
- Applicant: Cypress Semiconductor Corporation
- Applicant Address: US CA San Jose
- Assignee: Cypress Semiconductor Corporation
- Current Assignee: Cypress Semiconductor Corporation
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L49/02 ; H01L27/115 ; H01L21/768

Abstract:
Non-volatile memory cells including complimentary metal-oxide-semiconductor transistors and embedded ferroelectric capacitor and methods of forming the same are described. In one embodiment, the method includes forming on a surface of a substrate a gate level including a gate stack of a MOS transistor, a first dielectric layer overlying the MOS transistor and a first contact extending through the first dielectric layer from a top surface thereof to a diffusion region of the MOS transistor. A local interconnect (LI) layer is deposited over the top surface of the first dielectric layer and the first contact, a ferro stack including a bottom electrode, a top electrode and ferroelectric layer there between deposited over the LI layer, and the ferro stack and the LI layer patterned to form a ferroelectric capacitor and a LI through which the bottom electrode is electrically coupled to the diffusion region of the MOS transistor.
Public/Granted literature
- US20150004718A1 METHODS OF FABRICATING AN F-RAM Public/Granted day:2015-01-01
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