Invention Grant
US09548395B2 Field-effect transistor including oxide semiconductor, and memory and semiconductor circuit including the same
有权
包括氧化物半导体的场效应晶体管,以及包括其的存储器和半导体电路
- Patent Title: Field-effect transistor including oxide semiconductor, and memory and semiconductor circuit including the same
- Patent Title (中): 包括氧化物半导体的场效应晶体管,以及包括其的存储器和半导体电路
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Application No.: US14848515Application Date: 2015-09-09
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Publication No.: US09548395B2Publication Date: 2017-01-17
- Inventor: Shunpei Yamazaki , Hiromichi Godo , Yasuhiko Takemura
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2011-067213 20110325
- Main IPC: H01L29/12
- IPC: H01L29/12 ; H01L29/786 ; H01L27/06 ; H01L29/78 ; H01L27/108 ; H01L27/115 ; H01L27/12 ; H01L49/02 ; H01L29/417

Abstract:
Provided is a field-effect transistor (FET) having small off-state current, which is used in a miniaturized semiconductor integrated circuit. The field-effect transistor includes a thin oxide semiconductor which is formed substantially perpendicular to an insulating surface, a gate insulating film formed to cover the oxide semiconductor, and a gate electrode which is formed to cover the gate insulating film. The gate electrode partly overlaps a source electrode and a drain electrode. The source electrode and the drain electrode are in contact with at least a top surface of the oxide semiconductor. In this structure, three surfaces of the thin oxide semiconductor are covered with the gate electrode, so that electrons injected from the source electrode or the drain electrode can be effectively removed, and most of the space between the source electrode and the drain electrode can be a depletion region; thus, off-state current can be reduced.
Public/Granted literature
- US20150380417A1 Field-Effect Transistor, and Memory and Semiconductor Circuit Including the Same Public/Granted day:2015-12-31
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