Invention Grant
- Patent Title: Gallium nitride self-supported substrate, light-emitting device and manufacturing method therefor
- Patent Title (中): 氮化镓自支撑衬底,发光器件及其制造方法
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Application No.: US15016722Application Date: 2016-02-05
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Publication No.: US09548418B2Publication Date: 2017-01-17
- Inventor: Morimichi Watanabe , Jun Yoshikawa , Tsutomu Nanataki , Katsuhiro Imai , Tomohiko Sugiyama , Takashi Yoshino , Yukihisa Takeuchi , Kei Sato
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya-Shi
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya-Shi
- Agency: Burr & Brown, PLLC
- Priority: JP2013-115753 20130531; JP2013-260868 20131218; JP2014-071342 20140331
- Main IPC: H01L33/32
- IPC: H01L33/32 ; H01L33/00 ; H01L33/16 ; C30B29/40 ; C30B19/12 ; C30B9/00 ; C30B25/20 ; C30B19/02 ; H01L33/18 ; C30B9/12 ; C30B25/18 ; C30B28/04 ; C30B29/60

Abstract:
Provided is a self-supporting gallium nitride substrate useful as an alternative material for a gallium nitride single crystal substrate, which is inexpensive and also suitable for having a large area. This substrate is composed of a plate composed of gallium nitride-based single crystal grains, wherein the plate has a single crystal structure in the approximately normal direction. This substrate can be manufactured by a method comprising providing an oriented polycrystalline sintered body; forming a seed crystal layer composed of gallium nitride on the sintered body so that the seed crystal layer has crystal orientation mostly in conformity with the crystal orientation of the sintered body; forming a layer with a thickness of 20 μm or greater composed of gallium nitride-based crystals on the seed crystal layer so that the layer has crystal orientation mostly in conformity with crystal orientation of the seed crystal layer; and removing the sintered body.
Public/Granted literature
- US20160172541A1 GALLIUM NITRIDE SELF-SUPPORTED SUBSTRATE, LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2016-06-16
Information query
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