Invention Grant
US09548434B2 Wafer level packaging of electronic device 有权
晶圆级包装电子设备

Wafer level packaging of electronic device
Abstract:
Wafer level packaging of LED devices is accomplished using a bottom wafer that includes one or more vias. A passivation layer is placed over the top surface of the bottom wafer including the surface of the vias. Metal pads are placed on the top surface of the passivation layer and extend to the bottom of the vias. Bond pads are then associated with the metal pads and ultimately used in attaching an LED device bottom wafer assembly. An encapsulation layer is applied and in contact with the LED device and a top wafer is attached to the encapsulation layer. The thickness of the bottom wafer is reduced, removing the lower portion to expose the metal pads at the bottom of the vias. An isolation layer is applied to the bottom wafer and holes are formed in the isolation layer to expose the metal pads. Electroplated structures are in contact with the isolation layer and in contact with the exposed metal pads.
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