Invention Grant
US09548449B2 Conductive oxide random access memory (CORAM) cell and method of fabricating same
有权
导电氧化物随机存取存储器(CORAM)单元及其制造方法
- Patent Title: Conductive oxide random access memory (CORAM) cell and method of fabricating same
- Patent Title (中): 导电氧化物随机存取存储器(CORAM)单元及其制造方法
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Application No.: US13925951Application Date: 2013-06-25
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Publication No.: US09548449B2Publication Date: 2017-01-17
- Inventor: Elijah V. Karpov , Brian S. Doyle , Uday Shah , Robert S. Chau
- Applicant: Elijah V. Karpov , Brian S. Doyle , Uday Shah , Robert S. Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Conductive oxide random access memory (CORAM) cells and methods of fabricating CORAM cells are described. For example, a material layer stack for a memory element includes a first conductive electrode. An insulating layer is disposed on the first conductive oxide and has an opening with sidewalls therein that exposes a portion of the first conductive electrode. A conductive oxide layer is disposed in the opening, on the first conductive electrode and along the sidewalls of the opening. A second electrode is disposed in the opening, on the conductive oxide layer.
Public/Granted literature
- US20140374689A1 CONDUCTIVE OXIDE RANDOM ACCESS MEMORY (CORAM) CELL AND METHOD OF FABRICATING SAME Public/Granted day:2014-12-25
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