Invention Grant
- Patent Title: Alignment stage
- Patent Title (中): 对准阶段
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Application No.: US13988430Application Date: 2011-11-25
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Publication No.: US09548638B2Publication Date: 2017-01-17
- Inventor: Takafumi Komatsu , Katsuya Fukushima
- Applicant: Takafumi Komatsu , Katsuya Fukushima
- Applicant Address: JP Tokyo
- Assignee: THK CO., LTD.
- Current Assignee: THK CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2010-264771 20101129
- International Application: PCT/JP2011/006564 WO 20111125
- International Announcement: WO2012/073463 WO 20120607
- Main IPC: H02K7/14
- IPC: H02K7/14 ; H02K41/03 ; B23Q1/44 ; B23Q1/62

Abstract:
An alignment stage including: a base plate; one or more X direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line X; a pair of lower plates disposed above the X direction thrust generation guide mechanisms; a pair of upper plates provided corresponding to the lower plates, respectively; a pair of rotatable bearings disposed between the lower plates and the upper plates; one or more Y direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line Y perpendicular to the straight line X; and a table plate disposed above the Y direction thrust generation guide mechanisms. With this configuration, it is possible for the alignment stage to be compact and easy to assemble.
Public/Granted literature
- US20130278099A1 ALIGNMENT STAGE Public/Granted day:2013-10-24
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