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US09551829B2 Photoacoustic gas sensor with a helmholtz cell 有权
具有亥姆霍兹电池的光声气体传感器

Photoacoustic gas sensor with a helmholtz cell
Abstract:
A photoacoustic detection device including a nanophotonic circuit including a first chip on which is formed at least one optical waveguide and in which is formed a set of cavities defining a Helmholtz resonator; at least one optical source capable of emitting an optical signal in a given wavelength range, capable of being modulated at an acoustic modulation frequency, this source being attached to the first chip; a second chip forming a cap for said cavities and including acoustic sensors; and electronic circuits for processing the output of the acoustic sensors formed in the first or the second chip.
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