Invention Grant
- Patent Title: Scanning microscope
- Patent Title (中): 扫描显微镜
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Application No.: US14040081Application Date: 2013-09-27
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Publication No.: US09551862B2Publication Date: 2017-01-24
- Inventor: Masahiro Mizuta
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2011-077527 20110331
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B26/08

Abstract:
There is provided a scanning microscope so configured that when the position of the exit pupil of an imaging optical system and a position conjugate to the exit pupil change, the position of the rotation center of a scanned light flux is moved and follows the changed exit pupil position. A scanning microscope includes a light source, an objective lens, and a scan unit. The scan unit includes first to fourth deflectors, and the deflection angle of illumination light deflected off each of the first to fourth deflectors is so controlled that the pivotal point of the illumination light deflected off each of the first and second deflectors and the pivotal point of the illumination light deflected off each of the third and fourth deflectors substantially coincide with the exit pupil of the objective lens or a position conjugate to the exit pupil.
Public/Granted literature
- US20140092459A1 SCANNING MICROSCOPE Public/Granted day:2014-04-03
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