Invention Grant
- Patent Title: Metal liftoff tools and methods
- Patent Title (中): 金属剥离工具和方法
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Application No.: US14737143Application Date: 2015-06-11
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Publication No.: US09553005B2Publication Date: 2017-01-24
- Inventor: Scott Tice
- Applicant: MEI, LLC
- Applicant Address: US OR Albany
- Assignee: MEI, LLC
- Current Assignee: MEI, LLC
- Current Assignee Address: US OR Albany
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/67 ; H01L21/02 ; B08B3/02 ; B08B3/04 ; B08B3/00 ; H01L21/687 ; H01L21/677 ; H01L21/027

Abstract:
In certain embodiments the metal liftoff tool comprises an immersion tank for receiving a wafer cassette with wafers therein, the immersion tank including an inner weir, a lifting and lowering mechanism capable of raising and lowering the wafer cassette while submerged in fluid in the immersion tank, low pressure high velocity primary spray jets for stripping the metal, the primary spray jets positioned at opposing sides of the immersion tank parallel to the wafer surfaces planes, and secondary spray jets for pressure equalization force, positioned at the bottom of the immersion tank. A wafer lift insert is positioned at the bottom of the immersion tank to receive and periodically lift the wafers within the cassette.
Public/Granted literature
- US20150279701A1 METAL LIFTOFF TOOLS AND METHODS Public/Granted day:2015-10-01
Information query
IPC分类: