Invention Grant
US09553064B2 Electronic device, and manufacturing method of electronic device 有权
电子设备及电子设备的制造方法

Electronic device, and manufacturing method of electronic device
Abstract:
An electronic device includes a drive substrate (a pressure chamber substrate and a vibration plate) including a piezoelectric element and electrode wirings related to driving of the piezoelectric element formed thereon, and a sealing plate bonded thereto, the electrode wirings are made of wiring metal containing gold (Au) on the drive substrate through an adhesion layer which is a base layer, and has a removed portion in which a portion of the wiring metal in a region containing a part bonded to a bonding resin is removed and the adhesion layer is exposed.
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