Invention Grant
US09553118B2 Formation of buried color filters in a back side illuminated image sensor using an etching-stop layer
有权
在使用蚀刻停止层的背面照明图像传感器中形成掩埋滤色器
- Patent Title: Formation of buried color filters in a back side illuminated image sensor using an etching-stop layer
- Patent Title (中): 在使用蚀刻停止层的背面照明图像传感器中形成掩埋滤色器
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Application No.: US14307781Application Date: 2014-06-18
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Publication No.: US09553118B2Publication Date: 2017-01-24
- Inventor: Yun-Wei Cheng , Chiu-Jung Chen , Volume Chien , Kuo-Cheng Lee , Yung-Lung Hsu , Hsin-Chi Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. A buffer layer is disposed over the second side of the substrate. A plurality of elements is disposed over the buffer layer. The elements and the buffer layer have different material compositions. A plurality of light-blocking structures is disposed over the plurality of elements, respectively. The radiation-sensing regions are respectively aligned with a plurality of openings defined by the light-blocking structures, the elements, and the buffer layer.
Public/Granted literature
- US20150372033A1 FORMATION OF BURIED COLOR FILTERS IN A BACK SIDE ILLUMINATED IMAGE SENSOR USING AN ETCHING-STOP LAYER Public/Granted day:2015-12-24
Information query
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