Invention Grant
- Patent Title: Manufacturing method of thin film transistor and thin film transistor
- Patent Title (中): 薄膜晶体管和薄膜晶体管的制造方法
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Application No.: US14425994Application Date: 2014-06-26
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Publication No.: US09553170B2Publication Date: 2017-01-24
- Inventor: Xuecheng Hou , Tao Wu , Jian Guo
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE Technology Group Co., Ltd.,Beijing BOE Optoelectronics Technology Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.,Beijing BOE Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201410042408 20140128
- International Application: PCT/CN2014/080813 WO 20140626
- International Announcement: WO2015/113368 WO 20150806
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/308 ; H01L21/3213 ; H01L29/66 ; H01L27/12 ; H01L29/417

Abstract:
A manufacturing method of a thin film transistor and a thin film transistor are provided. In the manufacturing method, formation of pattern of a source electrode (7), a drain electrode (8) and an active layer (6) comprises: forming a semiconductor layer (10) and a conductive layer (11) that cover the whole substrate on the substrate in sequence; forming a first photoresist layer (4) at a region where the source electrode is to be formed and at a region where the drain electrode is to be formed on the conductive layer (11), respectively; forming a second photoresist layer (5) at least at a gap between the source electrode and the drain electrode that are to be formed on the conductive layer (11); conducting an etching process on the substrate with the first photoresist layer (4), the second photoresist layer (5), the semiconductor layer (10) and the conductive layer (11) formed thereon, so as to form pattern of the active layer (6), the source electrode (7) and the drain electrode (8).
Public/Granted literature
- US20160013294A1 MANUFACTURING METHOD OF THIN FILM TRANSISTOR AND THIN FILM TRANSISTOR Public/Granted day:2016-01-14
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