Invention Grant
US09557392B2 Integrated magnetometer and its manufacturing process 有权
集成磁力计及其制造工艺

Integrated magnetometer and its manufacturing process
Abstract:
Integrated magnetometer comprising a plurality of multilayer magnetoresistive sensors deposited on a surface, called the top surface, of a substantially planar substrate, characterized in that said top surface of the substrate has at least one cavity or protuberance provided with a plurality of inclined faces, and in that at least four said magnetoresistive sensors are placed on four said magnetoresistive sensors are placed on four said inclined faces, having different orientations and opposite one another in pairs, each sensor being sensitive to one component of an external magnetic field parallel to that face on which it is placed. Process for manufacturing such a magnetometer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0