Invention Grant
- Patent Title: Integrated magnetometer and its manufacturing process
- Patent Title (中): 集成磁力计及其制造工艺
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Application No.: US13575221Application Date: 2011-01-28
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Publication No.: US09557392B2Publication Date: 2017-01-31
- Inventor: Alain Schuhl , Gilles Gaudin , Philippe Sabon , Pierre-Jean Zermatten , François Montaigne
- Applicant: Alain Schuhl , Gilles Gaudin , Philippe Sabon , Pierre-Jean Zermatten , François Montaigne
- Applicant Address: FR Paris FR Paris
- Assignee: Centre National de la Recherche Scientifique,Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Centre National de la Recherche Scientifique,Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris FR Paris
- Agency: Morgan, Lewis & Bockius LLP
- Priority: FR1000369 20100129
- International Application: PCT/FR2011/000058 WO 20110128
- International Announcement: WO2011/092406 WO 20110804
- Main IPC: G01R33/09
- IPC: G01R33/09 ; G01R33/02 ; G01R33/00

Abstract:
Integrated magnetometer comprising a plurality of multilayer magnetoresistive sensors deposited on a surface, called the top surface, of a substantially planar substrate, characterized in that said top surface of the substrate has at least one cavity or protuberance provided with a plurality of inclined faces, and in that at least four said magnetoresistive sensors are placed on four said magnetoresistive sensors are placed on four said inclined faces, having different orientations and opposite one another in pairs, each sensor being sensitive to one component of an external magnetic field parallel to that face on which it is placed. Process for manufacturing such a magnetometer.
Public/Granted literature
- US20130134970A1 Integrated Magnetometer and its Manufacturing Process Public/Granted day:2013-05-30
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