Invention Grant
- Patent Title: Ordering block copolymers
- Patent Title (中): 订购嵌段共聚物
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Application No.: US14656753Application Date: 2015-03-13
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Publication No.: US09557640B2Publication Date: 2017-01-31
- Inventor: C. Grant Willson , Christopher Ellison , Michael Maher , Christopher Bates , Dustin Janes
- Applicant: Board of Regents, The University of Texas System
- Applicant Address: US TX Austin
- Assignee: Board of Regents, University of Texas System
- Current Assignee: Board of Regents, University of Texas System
- Current Assignee Address: US TX Austin
- Agency: Medlen & Carroll, LLP
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/00 ; G03F7/20 ; C09D153/00 ; G03F7/11 ; B81C1/00
Abstract:
A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
Public/Granted literature
- US20150261090A1 Ordering Block Copolymers Public/Granted day:2015-09-17
Information query
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