Invention Grant
US09558862B2 Conductive polymer composition, coated article having antistatic film formed from the composition, and patterning process using the composition
有权
导电聚合物组合物，具有由组合物形成的抗静电膜的涂布制品，以及使用该组合物的图案化工艺
- Patent Title: Conductive polymer composition, coated article having antistatic film formed from the composition, and patterning process using the composition
- Patent Title (中): 导电聚合物组合物，具有由组合物形成的抗静电膜的涂布制品，以及使用该组合物的图案化工艺
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Application No.: US14408911Application Date: 2013-06-06
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Publication No.: US09558862B2Publication Date: 2017-01-31
- Inventor: Toshiya Sawai , Takayuki Nagasawa , Satoshi Watanabe , Keiichi Masunaga
- Applicant: SHIN-ETSU POLYMER CO., LTD. , SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: SHIN-ETSU POLYMER CO., LTD.,SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU POLYMER CO., LTD.,SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Oliff PLC
- Priority: JP2012-148936 20120702
- International Application: PCT/JP2013/003561 WO 20130606
- International Announcement: WO2014/006821 WO 20140109
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/20 ; C08K5/16 ; G03F7/09 ; H01B1/12 ; C08K5/20
Abstract:
The present invention is a conductive polymer composition containing a π-conjugated conductive polymer, a polyanion, and a gemini surfactant. There can be provided a conductive polymer composition that has excellent antistatic performance and excellent application properties, does not adversely affect a resist, and can be suitably used in lithography using electron beam or the like.
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