Invention Grant
US09559146B2 Phase-change memory cell implant for dummy array leakage reduction
有权
用于虚拟阵列泄漏减少的相变存储单元注入
- Patent Title: Phase-change memory cell implant for dummy array leakage reduction
- Patent Title (中): 用于虚拟阵列泄漏减少的相变存储单元注入
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Application No.: US14581921Application Date: 2014-12-23
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Publication No.: US09559146B2Publication Date: 2017-01-31
- Inventor: Lequn J. Liu , Ugo Russo , Max F. Hineman
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe Williamson & Wyatt PC
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
Embodiments of the present disclosure describe phase-change memory cell implant for dummy array leakage reduction. In an embodiment, an apparatus includes a plurality of phase-change memory (PCM) elements, wherein individual PCM elements of the plurality of PCM elements are dummy cells including a bottom electrode layer, a select device layer disposed on the bottom electrode layer, a middle electrode layer disposed on the select device layer, a phase-change material layer disposed on the middle electrode layer, and a top electrode layer disposed on the phase-change material layer, wherein the phase-change material layer is doped with an impurity to reduce cell leakage of the dummy cells. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20160181324A1 PHASE-CHANGE MEMORY CELL IMPLANT FOR DUMMY ARRAY LEAKAGE REDUCTION Public/Granted day:2016-06-23
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