Invention Grant
US09561022B2 Device and method for optical image correction in metrology systems 有权
计量系统中光学图像校正的装置和方法

  • Patent Title: Device and method for optical image correction in metrology systems
  • Patent Title (中): 计量系统中光学图像校正的装置和方法
  • Application No.: US13755289
    Application Date: 2013-01-31
  • Publication No.: US09561022B2
    Publication Date: 2017-02-07
  • Inventor: Alexey Sharonov
  • Applicant: Covidien LP
  • Applicant Address: US MA Mansfield
  • Assignee: Covidien LP
  • Current Assignee: Covidien LP
  • Current Assignee Address: US MA Mansfield
  • Main IPC: A61B17/00
  • IPC: A61B17/00 G01B11/28 G01B11/25 G02B23/24
Device and method for optical image correction in metrology systems
Abstract:
An optical metrology and image correction device includes a point size light source adapted to emit a beam of light and a translucent mask that receive the beam of light. The translucent mask rotates from a first position wherein the beam of light is received by the translucent mask in a direction substantially orthogonal to the translucent mask to a second position wherein the beam of light is received by the translucent mask at an angle offset with respect to the translucent mask. A corresponding method of measuring and correcting an image from an optical metrology and image correction device includes emitting a beam of light from a point size light source, causing the beam of light to be received by a translucent mask in a first position substantially orthogonal to the mask and in a second position in a direction offset with respect to the translucent mask.
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