Invention Grant
US09561022B2 Device and method for optical image correction in metrology systems
有权
计量系统中光学图像校正的装置和方法
- Patent Title: Device and method for optical image correction in metrology systems
- Patent Title (中): 计量系统中光学图像校正的装置和方法
-
Application No.: US13755289Application Date: 2013-01-31
-
Publication No.: US09561022B2Publication Date: 2017-02-07
- Inventor: Alexey Sharonov
- Applicant: Covidien LP
- Applicant Address: US MA Mansfield
- Assignee: Covidien LP
- Current Assignee: Covidien LP
- Current Assignee Address: US MA Mansfield
- Main IPC: A61B17/00
- IPC: A61B17/00 ; G01B11/28 ; G01B11/25 ; G02B23/24

Abstract:
An optical metrology and image correction device includes a point size light source adapted to emit a beam of light and a translucent mask that receive the beam of light. The translucent mask rotates from a first position wherein the beam of light is received by the translucent mask in a direction substantially orthogonal to the translucent mask to a second position wherein the beam of light is received by the translucent mask at an angle offset with respect to the translucent mask. A corresponding method of measuring and correcting an image from an optical metrology and image correction device includes emitting a beam of light from a point size light source, causing the beam of light to be received by a translucent mask in a first position substantially orthogonal to the mask and in a second position in a direction offset with respect to the translucent mask.
Public/Granted literature
- US20130226156A1 DEVICE AND METHOD FOR OPTICAL IMAGE CORRECTION IN METROLOGY SYSTEMS Public/Granted day:2013-08-29
Information query