Invention Grant
US09561527B2 Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device
有权
超声波换能器，超声波探头和超声波检测装置
- Patent Title: Ultrasonic transducer, ultrasonic probe, and ultrasonic examination device
- Patent Title (中): 超声波换能器，超声波探头和超声波检测装置
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Application No.: US14994461Application Date: 2016-01-13
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Publication No.: US09561527B2Publication Date: 2017-02-07
- Inventor: Tomoaki Nakamura , Hironori Suzuki , Jiro Tsuruno
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2012-115320 20120521
- Main IPC: B06B1/06
- IPC: B06B1/06 ; H01L41/08 ; G01S15/02 ; A61B8/00 ; H01L41/053
Abstract:
An ultrasonic transducer includes a substrate, a supporting film disposed on the substrate, and a piezoelectric element disposed on the supporting film. The substrate includes an opening. The piezoelectric element is disposed on an area that overlaps the opening in a plan view in a thickness direction of the substrate. A thickness of the supporting film at an area that overlaps the piezoelectric element in a plan view of the supporting film is smaller than a thickness of the supporting film at a different area different from the area that overlaps the piezoelectric element.
Public/Granted literature
- US20160121368A1 ULTRASONIC TRANSDUCER, ULTRASONIC PROBE, AND ULTRASONIC EXAMINATION DEVICE Public/Granted day:2016-05-05
Information query
IPC分类:
