Invention Grant
- Patent Title: Continuously scanning XY translation stage
- Patent Title (中): 连续扫描XY平台
-
Application No.: US13985386Application Date: 2011-02-15
-
Publication No.: US09561566B2Publication Date: 2017-02-07
- Inventor: Matthew C. Putman , John B. Putman
- Applicant: Matthew C. Putman , John B. Putman
- Applicant Address: US OH Cuyahoga Falls
- Assignee: Nanotronics Imaging, Inc.
- Current Assignee: Nanotronics Imaging, Inc.
- Current Assignee Address: US OH Cuyahoga Falls
- Agency: Renner Kenner Greive Bobak Taylor & Weber
- International Application: PCT/US2011/024849 WO 20110215
- International Announcement: WO2012/112138 WO 20120823
- Main IPC: B23Q1/48
- IPC: B23Q1/48 ; B23Q1/62 ; H01L21/68 ; G03F7/20

Abstract:
An XY translation stage includes a primary drive mechanism and a stage drive assembly. The primary drive mechanism rotates the stage drive assembly about an axis of rotation. The XY translation stage also includes an object stage that orbits freely in a defined plane without rotation of the object stage out of that defined plane. A stage pin associates the stage drive assembly with the object stage such that rotational movement of the stage drive assembly yields orbital movement of the object stage within the defined plane. The positioning of the stage pin relative to the axis of rotation is adjustable such that the diameter of the orbital movement of the object stage is adjustable.
Public/Granted literature
- US20140027967A1 CONTINUOUSLY SCANNING XY TRANSLATION STAGE Public/Granted day:2014-01-30
Information query