Invention Grant
- Patent Title: Adjusting a substrate polishing condition
- Patent Title (中): 调整基板抛光条件
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Application No.: US14964132Application Date: 2015-12-09
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Publication No.: US09561575B2Publication Date: 2017-02-07
- Inventor: Yasuyuki Motoshima , Toru Maruyama
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2012-209275 20120924; JP2013-192105 20130917
- Main IPC: B24B37/005
- IPC: B24B37/005 ; B24B9/06 ; B24B49/03 ; B24B49/14

Abstract:
A polishing apparatus polishes a substrate by moving the substrate and a polishing pad relative to each other. The apparatus includes: an elastic modulus measuring device configured to measure an elastic modulus of the polishing pad, and a polishing condition adjustor configured to adjust polishing conditions of the substrate based on a measured value of the elastic modulus. The polishing conditions include pressure of a retaining ring, arranged around the substrate, exerted on the polishing pad and a temperature of the polishing pad.
Public/Granted literature
- US20160096250A1 ADJUSTING A SUBSTRATE POLISHING CONDITION Public/Granted day:2016-04-07
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