Invention Grant
US09562287B2 Method for producing hexagonal boron nitride film using borazine oligomer as a precursor
有权
使用环硼氮烷低聚物作为前体制备六方氮化硼膜的方法
- Patent Title: Method for producing hexagonal boron nitride film using borazine oligomer as a precursor
- Patent Title (中): 使用环硼氮烷低聚物作为前体制备六方氮化硼膜的方法
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Application No.: US14082831Application Date: 2013-11-18
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Publication No.: US09562287B2Publication Date: 2017-02-07
- Inventor: Myung Jong Kim , Sungchan Park , Hyunjin Cho , Sukang Bae , Jin-Hyung Park , Jung Ho Kang , Sang Ook Kang , Changhyup Lee
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Goldilocks Zone IP Law
- Priority: KR10-2013-0113046 20130924
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C16/34 ; C23C18/12 ; C23C18/14

Abstract:
Provided is a method for producing a high-quality boron nitride film grown by using a borazine oligomer as a precursor through a metal catalyst effect. The method solves the problems, such as control of a gaseous precursor and vapor pressure control, occurring in CVD (Chemical vapor deposition) according to the related art, and a high-quality hexagonal boron nitride film is obtained through a simple process at low cost. In addition, the hexagonal boron nitride film may be coated onto various structures and materials. Further, selective coating is allowed so as to carry out coating in a predetermined area and scale-up is also allowed. Therefore, the method may be useful for coating applications of composite materials and various materials.
Public/Granted literature
- US20150086460A1 METHOD FOR PRODUCING HEXAGONAL BORON NITRIDE FILM USING BORAZINE OLIGOMER AS A PRECURSOR Public/Granted day:2015-03-26
Information query
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