Invention Grant
US09562287B2 Method for producing hexagonal boron nitride film using borazine oligomer as a precursor 有权
使用环硼氮烷低聚物作为前体制备六方氮化硼膜的方法

Method for producing hexagonal boron nitride film using borazine oligomer as a precursor
Abstract:
Provided is a method for producing a high-quality boron nitride film grown by using a borazine oligomer as a precursor through a metal catalyst effect. The method solves the problems, such as control of a gaseous precursor and vapor pressure control, occurring in CVD (Chemical vapor deposition) according to the related art, and a high-quality hexagonal boron nitride film is obtained through a simple process at low cost. In addition, the hexagonal boron nitride film may be coated onto various structures and materials. Further, selective coating is allowed so as to carry out coating in a predetermined area and scale-up is also allowed. Therefore, the method may be useful for coating applications of composite materials and various materials.
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