Invention Grant
US09562763B2 Apparatus for inspecting curvature 有权
用于检查曲率的装置

Apparatus for inspecting curvature
Abstract:
An apparatus for inspecting curvature, including: a radiation unit radiating a plurality of rays of light having different focal lengths onto a surface of an target material; and an inspection unit inspecting the surface of the target material using the rays of light reflected from the target material. The apparatus can inspect the curvature or the bending of the surface of a target material at a high speed and with high accuracy.
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