Invention Grant
- Patent Title: Deposition rate measuring apparatus
- Patent Title (中): 沉积速率测量仪
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Application No.: US14754781Application Date: 2015-06-30
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Publication No.: US09562798B2Publication Date: 2017-02-07
- Inventor: Hee Dok Choi
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0010852 20150122
- Main IPC: G01N17/00
- IPC: G01N17/00 ; G01F1/66 ; H01L21/67 ; C23C14/54

Abstract:
A deposition rate measuring apparatus, including a crystal sensor facing a specific deposition source among a plurality of deposition sources in a deposition apparatus; a deposition-preventing bracket in a front portion of the crystal sensor, the deposition-preventing bracket having an opening that assists inflow of a specific deposition material, the deposition-preventing bracket extending from the opening, and the deposition-preventing bracket surrounding the crystal sensor to prevent interference due to at least one deposition material from at least one adjacent deposition source adjacent to the specific deposition source; and one or more cover portions spaced apart from the opening inward of the deposition-preventing bracket by a predetermined length.
Public/Granted literature
- US20160216143A1 DEPOSITION RATE MEASURING APPARATUS Public/Granted day:2016-07-28
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