Invention Grant
US09562846B2 Particle suspensions used as low-contrast standards for inspection of liquids
有权
用作液体检查的低对比度标准的颗粒悬浮液
- Patent Title: Particle suspensions used as low-contrast standards for inspection of liquids
- Patent Title (中): 用作液体检查的低对比度标准的颗粒悬浮液
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Application No.: US14324872Application Date: 2014-07-07
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Publication No.: US09562846B2Publication Date: 2017-02-07
- Inventor: Francisco Kole , Johannes G. M. Christiaanse , Greg Kirk , Winfred Tee Chow
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- Agent Eric B. Meyertons
- Main IPC: G01N15/02
- IPC: G01N15/02 ; G01N21/27 ; G01N15/00 ; G01N15/06 ; G01N1/28

Abstract:
In certain embodiments, a method for validating the human visual inspection process or an optical analysis instrument for use with biological particles may include inspecting a standard particle solution using the optical analysis instrument. The standard particle solution may include a known concentration of standard particles suspended in solution with the standard particles having a defined size and shape distribution. The standard particles may have a refractive index that is substantially similar to a refractive index of the biological particles. The method may include assessing a concentration of standard particles in the standard particle solution from the inspection. The method may include assessing a difference between the assessed concentration of standard particles and the known concentration of standard particles. The method may include modifying one or more parameters of the optical analysis instrument based on the assessed difference between the concentrations. The method may include assessing a detection efficiency of the optical analysis instrument.
Public/Granted literature
- US20150015872A1 PARTICLE SUSPENSIONS USED AS LOW-CONTRAST STANDARDS FOR INSPECTION OF LIQUIDS Public/Granted day:2015-01-15
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