Invention Grant
US09562884B2 Method for manufacturing NO2 gas sensor for detection at room temperature
有权
用于在室温下检测的NO 2气体传感器的制造方法
- Patent Title: Method for manufacturing NO2 gas sensor for detection at room temperature
- Patent Title (中): 用于在室温下检测的NO 2气体传感器的制造方法
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Application No.: US14896342Application Date: 2013-06-05
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Publication No.: US09562884B2Publication Date: 2017-02-07
- Inventor: Dongmei Li , Shuang Zhan , Shengfa Liang , Xin Chen , Changqing Xie , Ming Liu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Christensen Fonder P.A.
- International Application: PCT/CN2013/076761 WO 20130605
- International Announcement: WO2014/194484 WO 20141211
- Main IPC: C03C15/00
- IPC: C03C15/00 ; G01N33/00 ; G01N27/00 ; G01N27/12

Abstract:
A method for manufacturing an NO2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO2 sensitive film; and bonding the SWCNTs/SnO2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.
Public/Granted literature
- US20160123944A1 METHOD FOR MANUFACTURING NO2 GAS SENSOR FOR DETECTION AT ROOM TEMPERATURE Public/Granted day:2016-05-05
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