Invention Grant
- Patent Title: Stress-based sensor, method, and applications
- Patent Title (中): 基于应力的传感器,方法和应用
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Application No.: US13637861Application Date: 2011-03-31
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Publication No.: US09562888B2Publication Date: 2017-02-07
- Inventor: Jeevak M. Parpia , Harold G. Craighead , Darren R. Southworth , Leon M. Bellan
- Applicant: Jeevak M. Parpia , Harold G. Craighead , Darren R. Southworth , Leon M. Bellan
- Applicant Address: US NY Ithaca
- Assignee: CORNELL UNIVERSITY
- Current Assignee: CORNELL UNIVERSITY
- Current Assignee Address: US NY Ithaca
- Agency: Bond, Schoeneck & King, PLLC
- Agent William Greener
- International Application: PCT/US2011/030673 WO 20110331
- International Announcement: WO2011/162847 WO 20111229
- Main IPC: G01N33/497
- IPC: G01N33/497 ; G01N29/02

Abstract:
A composite, analyte sensor includes a substrate; a micro- or nano-electro-mechanical (MEMS; NEMS) resonator that is coupled to the substrate at least two edge locations (i.e., it is at least doubly-clamped) of the resonator, wherein the resonator is in a statically-buckled state near a buckling transition point of the resonator; and a chemically-responsive substance covering at least a portion of the surface of the resonator that will undergo a conformational change upon exposure to a given analyte. The resonator may be a double-clamped, statically-buckled beam (or bridge), a multiply-clamped, statically-buckled dome (or crater), or other resonator geometry. The sensor may include two or more at least double-clamped, statically-buckled, composite MEMS or NEMS resonators each operating near a buckling transition point of the respective resonator, and each characterized by a different resonant frequency. A method for sensing an analyte in ambient air.
Public/Granted literature
- US20130118228A1 STRESS-BASED SENSOR, METHOD, AND APPLICATIONS Public/Granted day:2013-05-16
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