Invention Grant
US09562953B2 Magnetic field sensing module, measurement method, and manufacturing method of a magnetic field sensing module 有权
磁场感测模块,测量方法和磁场感测模块的制造方法

Magnetic field sensing module, measurement method, and manufacturing method of a magnetic field sensing module
Abstract:
A magnetic field sensing module including a plurality of magnetic flux concentrators and a plurality of sensing elements is provided. Each of the magnetic flux concentrators extends along a first extension direction, and the magnetic flux concentrators are arranged along a second direction. The sensing elements are respectively disposed at a position corresponding to a position between the magnetic flux concentrators and positions corresponding to two sides of the magnetic flux concentrators arranged along the second direction. Sensing directions of the sensing elements are substantially the same. A measurement method and a manufacturing method of a magnetic field sensing module are also provided.
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