Invention Grant
- Patent Title: Optical waveguide structure and manufacturing method thereof
- Patent Title (中): 光波导结构及其制造方法
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Application No.: US14961031Application Date: 2015-12-07
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Publication No.: US09563015B1Publication Date: 2017-02-07
- Inventor: Yi-Jen Chiu , Yi-Jhe Chen , Chung-Yi Lin , Wei Lin
- Applicant: National Sun Yat-sen University
- Applicant Address: TW
- Assignee: National Sun Yat-sen University
- Current Assignee: National Sun Yat-sen University
- Current Assignee Address: TW
- Agency: Emerson, Thomson & Bennett, LLC
- Agent Roger D. Emerson
- Priority: TW104123936A 20150723
- Main IPC: G02B6/26
- IPC: G02B6/26 ; G02B6/122 ; G02B6/136 ; G02B6/132 ; G02B6/42 ; G02B6/12

Abstract:
An optical waveguide structure and a manufacturing method thereof are disclosed. The optical waveguide structure has a first waveguide layer, a binding layer, and a second waveguide layer. The first waveguide layer has a taper portion, a connecting portion, and a strip portion. The manufacturing method of the optical waveguide structure has steps of etching to form the first waveguide layer, and then etching to form the second waveguide layer under the first waveguide layer.
Public/Granted literature
- US20170023734A1 OPTICAL WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-01-26
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