A laser system is configured to form at least one laser induced channel in a substrate and includes a laser and a laser path. The laser produces a laser beam, and the laser path includes an optical assembly that receives the laser beam and emits a conditioned laser beam. The optical assembly is configured to emit the conditioned laser beam with a substantially uniform focal energy distribution in a focal region defined along the direction of propagation. An apparatus includes a laser induced channel edge with a plurality of laser induced channels spanning some or all of the thickness of the substrate, which can be greater than 4 mm.