Invention Grant
US09563134B2 Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system 有权
要照明的光学系统照明面,曝光装置,压印装置,制品制造方法,光学元件以及制造光学系统的方法

Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system
Abstract:
An optical system illuminating a surface to be illuminated includes a wavefront splitting type integrator configured to split the wavefront of incident light to form a plurality of light sources on the exit surface side, and an optical element whose surface is polished in a scanning direction using a polishing tool. The optical element is disposed between the wavefront splitting type integrator and the surface to be illuminated, and has a direction indicating portion indicating the scanning direction. The arrangement direction of the plurality of light sources in a plane perpendicular to the optical axis of the optical system is non-parallel to the scanning direction indicated by the direction indicating portion.
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