Invention Grant
- Patent Title: Method and arrangement for manufacturing a radiation window
- Patent Title (中): 制造辐射窗的方法和装置
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Application No.: US14377345Application Date: 2012-02-15
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Publication No.: US09564252B2Publication Date: 2017-02-07
- Inventor: Esa Kostamo , Jari Kostamo , Marco Mattila , Heikki Johannes Sipilä
- Applicant: Esa Kostamo , Jari Kostamo , Marco Mattila , Heikki Johannes Sipilä
- Applicant Address: FI Espoo
- Assignee: HS FOILS OY
- Current Assignee: HS FOILS OY
- Current Assignee Address: FI Espoo
- Agency: Young & Thompson
- International Application: PCT/FI2012/050149 WO 20120215
- International Announcement: WO2013/121078 WO 20130822
- Main IPC: B29D11/00
- IPC: B29D11/00 ; C03C15/00 ; C03C25/68 ; C25F3/00 ; H01L21/302 ; H01L21/461 ; G21K1/10 ; H01L21/311 ; B82Y30/00 ; H01J5/18 ; H01J9/24 ; B32B37/24 ; B32B38/00 ; B32B38/10

Abstract:
In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer.
Public/Granted literature
- US20150053640A1 METHOD AND ARRANGEMENT FOR MANUFACTURING A RADIATION WINDOW Public/Granted day:2015-02-26
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