Invention Grant
- Patent Title: Monolithically stacked image sensors
- Patent Title (中): 单片堆叠图像传感器
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Application No.: US14729606Application Date: 2015-06-03
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Publication No.: US09564464B2Publication Date: 2017-02-07
- Inventor: Raminda Madurawe , Irfan Rahim
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Treyz Law Group, P.C.
- Agent Jason Tsai; Joseph F. Guihan
- Main IPC: H04N5/378
- IPC: H04N5/378 ; H01L27/146

Abstract:
An imaging system may be formed from multiple stacked wafers. A first wafer may include backside illuminated photodiodes, floating diffusion regions, and charge transfer gate structures. The first wafer may be bonded to a second wafer that includes pixel trunk transistors such as reset transistors, source-follower transistors, row-select transistors and associated logic circuits. The pixel trunk transistors may be formed using bottom-gate thin-body transistors. The first and second wafers may share the same backend metallization layers. The second wafer may further be bonded to a third wafer that includes digital signal processing circuits. The digital signal processing circuits may also be implemented using bottom-gate thin-body transistors. Additional metallization layers may be formed over the third wafer. The first, second, and third wafers may be fabricated using the same or different technology nodes.
Public/Granted literature
- US20160358967A1 MONOLITHICALLY STACKED IMAGE SENSORS Public/Granted day:2016-12-08
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