Invention Grant
- Patent Title: Process for treating a substrate using a luminous flux of determined wavelength, and corresponding substrate
- Patent Title (中): 使用确定波长的光束处理衬底的工艺以及相应的衬底
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Application No.: US14932349Application Date: 2015-11-04
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Publication No.: US09564496B2Publication Date: 2017-02-07
- Inventor: Michel Bruel
- Applicant: Soitec
- Applicant Address: FR Brenin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Brenin
- Agency: TraskBritt
- Priority: FR1057211 20100910
- Main IPC: H01L29/36
- IPC: H01L29/36 ; H01L21/268 ; H01L21/302 ; H01L21/78 ; H01L21/762 ; H01L29/06

Abstract:
A substrate is treated by means of at least one pulse of a luminous flux of determined wavelength. The substrate comprises an embedded layer that absorbs the luminous flux independently of the temperature. The embedded layer is interleaved between a first treatment layer and a second treatment layer. The first treatment layer has a coefficient of absorption of luminous flux that is low at ambient temperature and rises as the temperature rises. The luminous flux may be applied in several places of a surface of the first layer to heat regions of the embedded layer and generate a propagating thermal front in the first layer opposite the heated regions of the embedded layer, which generate constraints within the second layer.
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