Invention Grant
US09564496B2 Process for treating a substrate using a luminous flux of determined wavelength, and corresponding substrate 有权
使用确定波长的光束处理衬底的工艺以及相应的衬底

  • Patent Title: Process for treating a substrate using a luminous flux of determined wavelength, and corresponding substrate
  • Patent Title (中): 使用确定波长的光束处理衬底的工艺以及相应的衬底
  • Application No.: US14932349
    Application Date: 2015-11-04
  • Publication No.: US09564496B2
    Publication Date: 2017-02-07
  • Inventor: Michel Bruel
  • Applicant: Soitec
  • Applicant Address: FR Brenin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Brenin
  • Agency: TraskBritt
  • Priority: FR1057211 20100910
  • Main IPC: H01L29/36
  • IPC: H01L29/36 H01L21/268 H01L21/302 H01L21/78 H01L21/762 H01L29/06
Process for treating a substrate using a luminous flux of determined wavelength, and corresponding substrate
Abstract:
A substrate is treated by means of at least one pulse of a luminous flux of determined wavelength. The substrate comprises an embedded layer that absorbs the luminous flux independently of the temperature. The embedded layer is interleaved between a first treatment layer and a second treatment layer. The first treatment layer has a coefficient of absorption of luminous flux that is low at ambient temperature and rises as the temperature rises. The luminous flux may be applied in several places of a surface of the first layer to heat regions of the embedded layer and generate a propagating thermal front in the first layer opposite the heated regions of the embedded layer, which generate constraints within the second layer.
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