Invention Grant
US09564549B2 Germainium pin photodiode for integration into a CMOS or BICMOS technology
有权
用于集成到CMOS或BICMOS技术中的Germainium引脚光电二极管
- Patent Title: Germainium pin photodiode for integration into a CMOS or BICMOS technology
- Patent Title (中): 用于集成到CMOS或BICMOS技术中的Germainium引脚光电二极管
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Application No.: US14429131Application Date: 2013-09-19
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Publication No.: US09564549B2Publication Date: 2017-02-07
- Inventor: Dieter Knoll , Stefan Lischke , Lars Zimmermann , Yuji Yamamoto , Andreas Trusch
- Applicant: IHP GmbH—Innovations for High Performance Microelectronics/Leibniz-Institut Fur Innovative Mikroelektro
- Applicant Address: DE Frankfurt
- Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
- Current Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
- Current Assignee Address: DE Frankfurt
- Agency: Ware, Fressola, Maguire & Barber LLP
- Priority: DE102012216811 20120919; DE102013201644 20130131
- International Application: PCT/EP2013/069511 WO 20130919
- International Announcement: WO2014/044771 WO 20140327
- Main IPC: H01L31/105
- IPC: H01L31/105 ; H01L31/0224 ; H01L31/0232 ; H01L31/028

Abstract:
A diode comprising a light-sensitive germanium region which is totally embedded in silicon and forms with the silicon a lower interface and lateral interfaces, wherein the lateral interfaces do not extend perpendicularly, but obliquely to the lower interface and therefore produce a faceted form.
Public/Granted literature
- US20150325736A1 GERMAINIUM PIN PHOTODIODE FOR INTEGRATION INTO A CMOS OR BICMOS TECHNOLOGY Public/Granted day:2015-11-12
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