Invention Grant
- Patent Title: Forming method and forming apparatus of carbon nanotubes
- Patent Title (中): 碳纳米管的成型方法和成型装置
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Application No.: US14671274Application Date: 2015-03-27
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Publication No.: US09564589B2Publication Date: 2017-02-07
- Inventor: Yuji Awano , Noriyoshi Shimizu
- Applicant: FUJITSU LIMITED
- Applicant Address: JP Kawasaki
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: JP Kawasaki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2003-187331 20030630; JP2003-298337 20030822
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/05 ; C23C16/46 ; C01B31/02 ; C23C16/48 ; B82Y10/00 ; B82Y30/00 ; B82Y40/00 ; C23C14/22 ; C23C16/04 ; C23C16/26 ; H01L21/768 ; H01L23/532 ; H01L29/06 ; H01L29/775
Abstract:
A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.
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