Invention Grant
US09564836B2 Transducer, and manufacturing method of the transducer 有权
传感器和传感器的制造方法

  • Patent Title: Transducer, and manufacturing method of the transducer
  • Patent Title (中): 传感器和传感器的制造方法
  • Application No.: US14129908
    Application Date: 2012-06-26
  • Publication No.: US09564836B2
    Publication Date: 2017-02-07
  • Inventor: Seung-Mok Lee
  • Applicant: Seung-Mok Lee
  • Agency: Masuvalley & Partners
  • Priority: JP2011-141581 20110627; JP2011-141582 20110627
  • International Application: PCT/JP2012/066243 WO 20120626
  • International Announcement: WO2013/002207 WO 20130103
  • Main IPC: H02N1/00
  • IPC: H02N1/00 G01N29/24 B06B1/02 B81C1/00 G01H11/06 H01L29/84
Transducer, and manufacturing method of the transducer
Abstract:
A transducer, and a method for manufacturing the transducer are provided. The transducer includes a substrate-side electrode provided in one side of an insulative substrate and an opposite plate including an opposite electrode disposed opposite to the substrate-side electrode, and which performs a function such as a reduction in impedance, conversion of capacitance, signal amplification, thereby achieving size reduction of the transducer itself. An upper plate is made of a silicon monocrystal and is arranged so as to face a substrate-side electrode. In the upper plate, an integrated circuit section which is an impurity region of an IC circuit is formed by a thermal diffusion method or an ion implantation method. By this transducer, an improvement in conversion efficiency, an improvement in productivity, and a size reduction of a mount system are achieved.
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