Invention Grant
- Patent Title: Transducer, and manufacturing method of the transducer
- Patent Title (中): 传感器和传感器的制造方法
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Application No.: US14129908Application Date: 2012-06-26
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Publication No.: US09564836B2Publication Date: 2017-02-07
- Inventor: Seung-Mok Lee
- Applicant: Seung-Mok Lee
- Agency: Masuvalley & Partners
- Priority: JP2011-141581 20110627; JP2011-141582 20110627
- International Application: PCT/JP2012/066243 WO 20120626
- International Announcement: WO2013/002207 WO 20130103
- Main IPC: H02N1/00
- IPC: H02N1/00 ; G01N29/24 ; B06B1/02 ; B81C1/00 ; G01H11/06 ; H01L29/84

Abstract:
A transducer, and a method for manufacturing the transducer are provided. The transducer includes a substrate-side electrode provided in one side of an insulative substrate and an opposite plate including an opposite electrode disposed opposite to the substrate-side electrode, and which performs a function such as a reduction in impedance, conversion of capacitance, signal amplification, thereby achieving size reduction of the transducer itself. An upper plate is made of a silicon monocrystal and is arranged so as to face a substrate-side electrode. In the upper plate, an integrated circuit section which is an impurity region of an IC circuit is formed by a thermal diffusion method or an ion implantation method. By this transducer, an improvement in conversion efficiency, an improvement in productivity, and a size reduction of a mount system are achieved.
Public/Granted literature
- US20140246948A1 TRANSDUCER, AND MANUFACTURING METHOD OF THE TRANSDUCER Public/Granted day:2014-09-04
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