Invention Grant
US09566791B2 Method for manufacturing semiconductor chip 有权
制造半导体芯片的方法

Method for manufacturing semiconductor chip
Abstract:
There is provided a method for manufacturing semiconductor chips in which the chips as many as possible are arranged on one substrate and these chips can be cut with high accuracy in a relatively simple process. For such occasion on a wafer, short sides of the semiconductor chips are laid out to be inclined at an angle of 5° or less to a crystal orientation of the wafer. Thereafter, a laser stealth dicing method is used to form a plurality of first dicing lines along long sides of the individual semiconductor chips and a plurality of second dicing lines along short sides thereof.
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