Invention Grant
- Patent Title: Sputtering target for magnetic recording film, and process for producing same
- Patent Title (中): 磁记录膜的溅射靶及其制造方法
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Application No.: US13808172Application Date: 2011-02-02
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Publication No.: US09567665B2Publication Date: 2017-02-14
- Inventor: Hideo Takami , Atsushi Nara , Shin-ichi Ogino
- Applicant: Hideo Takami , Atsushi Nara , Shin-ichi Ogino
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson, LLP
- Priority: JP2010-171038 20100729; JP2010-283678 20101220
- International Application: PCT/JP2011/052125 WO 20110202
- International Announcement: WO2012/014504 WO 20120202
- Main IPC: C23C14/35
- IPC: C23C14/35 ; C23C14/14 ; C23C14/08 ; H01J37/34 ; C23C14/06 ; C23C14/34 ; G11B5/851

Abstract:
Provided is a sputtering target containing SiO2 for a magnetic recording film, wherein a ratio of the peak intensity of cristobalites, which are crystallized SiO2, to the background intensity (cristobalite peak intensity/background intensity) in an X-ray diffraction is 1.40 or less. The present invention aims to obtain a sputtering target for a magnetic recording film capable of inhibiting the formation of cristobalites in the target which cause the generation of particles during sputtering, and shortening the burn-in time.
Public/Granted literature
- US20130098760A1 SPUTTERING TARGET FOR MAGNETIC RECORDING FILM, AND PROCESS FOR PRODUCING SAME Public/Granted day:2013-04-25
Information query
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