Invention Grant
- Patent Title: Apparatus and method for dynamic control of plated uniformity with the use of remote electric current
- Patent Title (中): 使用远程电流动态控制电镀均匀性的装置和方法
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Application No.: US14602910Application Date: 2015-01-22
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Publication No.: US09567685B2Publication Date: 2017-02-14
- Inventor: Burhanuddin Kagajwala , Bryan L. Buckalew , Steven T. Mayer , Lee Peng Chua , Aaron Berke , James Isaac Fortner , Robert Rash
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/02
- IPC: C25D17/02 ; C25D5/04 ; C25D17/00 ; C25D17/06 ; C25D17/10 ; C25D17/12 ; C25D7/12

Abstract:
An apparatus for electroplating metal on a substrate while controlling plating uniformity includes in one aspect: a plating chamber having anolyte and catholyte compartments separated by a membrane; a primary anode positioned in the anolyte compartment; an ionically resistive ionically permeable element positioned between the membrane and a substrate in the catholyte compartment; and a secondary electrode configured to donate and/or divert plating current to and/or from the substrate, wherein the secondary electrode is positioned such that the donated and/or diverted plating current does not cross the membrane separating the anolyte and catholyte compartments, but passes through the ionically resistive ionically permeable element. In some embodiments the secondary electrode is an azimuthally symmetrical anode (e.g., a ring positioned in a separate compartment around the periphery of the plating chamber) that can be dynamically controlled during electroplating.
Public/Granted literature
- US20160215408A1 APPARATUS AND METHOD FOR DYNAMIC CONTROL OF PLATED UNIFORMITY WITH THE USE OF REMOTE ELECTRIC CURRENT Public/Granted day:2016-07-28
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