Invention Grant
US09568387B2 Thermal diagnostic for single-crystal process fluid pressure sensor 有权
单晶工艺流体压力传感器的热诊断

Thermal diagnostic for single-crystal process fluid pressure sensor
Abstract:
A method of verifying a condition of a single-crystal pressure sensor is provided. The method includes providing a single-crystal pressure sensor that has at least one electrical characteristic that varies with applied pressure being coupled to a first output and a second output. The pressure sensor also has at least one resistive element therein. A current is applied through the resistive element to heat the pressure sensor. At least one output of the pressure sensor is monitored to determine a response of the pressure sensor to current-induced heat. A verification output is provided based on the response.
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