Invention Grant
- Patent Title: Thermal diagnostic for single-crystal process fluid pressure sensor
- Patent Title (中): 单晶工艺流体压力传感器的热诊断
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Application No.: US13569894Application Date: 2012-08-08
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Publication No.: US09568387B2Publication Date: 2017-02-14
- Inventor: Robert C. Hedtke
- Applicant: Robert C. Hedtke
- Applicant Address: US MN Chanhassen
- Assignee: Rosemount Inc.
- Current Assignee: Rosemount Inc.
- Current Assignee Address: US MN Chanhassen
- Agency: Westman, Champlin & Koehler, P.A.
- Main IPC: G01L27/00
- IPC: G01L27/00 ; G01L9/00

Abstract:
A method of verifying a condition of a single-crystal pressure sensor is provided. The method includes providing a single-crystal pressure sensor that has at least one electrical characteristic that varies with applied pressure being coupled to a first output and a second output. The pressure sensor also has at least one resistive element therein. A current is applied through the resistive element to heat the pressure sensor. At least one output of the pressure sensor is monitored to determine a response of the pressure sensor to current-induced heat. A verification output is provided based on the response.
Public/Granted literature
- US20140041437A1 THERMAL DIAGNOSTIC FOR SINGLE-CRYSTAL PROCESS FLUID PRESSURE SENSOR Public/Granted day:2014-02-13
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