Invention Grant
US09568564B2 Magnetic nano-multilayers for magnetic sensors and manufacturing method thereof
有权
用于磁传感器的磁性纳米多层及其制造方法
- Patent Title: Magnetic nano-multilayers for magnetic sensors and manufacturing method thereof
- Patent Title (中): 用于磁传感器的磁性纳米多层及其制造方法
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Application No.: US13701474Application Date: 2011-03-04
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Publication No.: US09568564B2Publication Date: 2017-02-14
- Inventor: Qinli Ma , Houfang Liu , Xiufeng Han
- Applicant: Qinli Ma , Houfang Liu , Xiufeng Han
- Applicant Address: CN Haidian District
- Assignee: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF PHYSICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Haidian District
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: CN201010195799 20100601
- International Application: PCT/CN2011/000356 WO 20110304
- International Announcement: WO2011/150665 WO 20111208
- Main IPC: G01R33/02
- IPC: G01R33/02 ; B82Y25/00 ; G01R33/09 ; G11B5/39 ; H01L43/08 ; G11C11/16 ; B82Y10/00 ; H01L21/00

Abstract:
The invention discloses a magnetic nano-multilayers structure and the method for making it. The multilayer film includes—sequentially from one end to the other end—a substrate, a bottom layer, a magnetic reference layer, a space layer, a magnetic detecting layer and a cap layer. The, up-stated structure is for convert the information of the rotation of the magnetic moment of the magnetic detecting layer into electrical signals. The magnetic detecting layer is of a pinning structure to react to the magnetic field under detection. On the other hand, the invention sandwiches an intervening layer between the AFM and the FM to mitigate the pinning effect from the exchange bias. Moreover, the thickness of the intervening layer is adjustable to control the pinning effect from the exchange bias. The controllability ensures that the magnetic moments of the magnetic reference layer and the magnetic detecting layer remain at right angles to each other when the external field is zero. The invention achieves a GMR or TMR magnetic sensor exhibiting a linear response and by tuning the thickness of the non-magnetic metallic layer, the sensitivity as well as the detecting range of the devices can be tuned easily.
Public/Granted literature
- US20130099780A1 MAGNETIC NANO-MULTILAYERS FOR MAGNETIC SENSORS AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-04-25
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