Invention Grant
- Patent Title: Preparation method of graphene nanoribbon on h-BN
- Patent Title (中): h-BN上石墨烯纳米棒的制备方法
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Application No.: US14803371Application Date: 2015-07-20
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Publication No.: US09570294B2Publication Date: 2017-02-14
- Inventor: Haomin Wang , Li He , Lingxiu Chen , Hong Xie , Huishan Wang , Shujie Tang , Lei Li , Daoli Zhang , Xiaoming Xie , Mianheng Jiang
- Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Current Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Shanghai
- Agency: Global IP Services
- Agent Tianhua Gu
- Priority: CN201510986759 20150305
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/311

Abstract:
A preparation method of a graphene nanoribbon on h-BN, comprising: 1) forming a h-BN groove template with a nano ribbon-shaped groove structure on the h-BN by adopting a metal catalysis etching method; 2) growing a graphene nanoribbon in the h-BN groove template by adopting a chemical vapor deposition method. In the present invention, a CVD method is adopted to directly prepare a morphology controllable graphene nanoribbon on the h-BN, which helps to solve the long-term critical problem that the graphene is difficult to nucleate and grow on an insulating substrate, and to avoid the series of problems introduced by the complicated processes of the transferring of the graphene and the subsequent clipping manufacturing for a nanoribbon and the like.
Public/Granted literature
- US20160260604A1 PREPARATION METHOD OF GRAPHENE NANORIBBON ON h-BN Public/Granted day:2016-09-08
Information query
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