Invention Grant
- Patent Title: Formation of SiGe nanotubes
- Patent Title (中): SiGe纳米管的形成
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Application No.: US14847619Application Date: 2015-09-08
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Publication No.: US09570299B1Publication Date: 2017-02-14
- Inventor: Kangguo Cheng , Hong He , Ali Khakifirooz , Juntao Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/306 ; H01L21/324 ; H01L29/06 ; H01L29/161 ; G01N33/00 ; B82Y15/00 ; B82Y40/00

Abstract:
Techniques for forming nanostructured materials are provided. In one aspect of the invention, a method for forming nanotubes on a buried insulator includes the steps of: forming one or more fins in a SOI layer of an SOI wafer, wherein the SOI wafer has a substrate separated from the SOI layer by the buried insulator; forming a SiGe layer on the fins; annealing the SiGe layer under conditions sufficient to drive-in Ge from the SiGe layer into the fins and form a SiGe shell completely surrounding each of the fins; and removing the fins selective to the SiGe shell, wherein the SiGe shell which remains forms the nanotubes on the buried insulator. A nanotube structure and method of forming a nanotube device are also provided.
Public/Granted literature
- US20170069492A1 Formation of SiGe Nanotubes Public/Granted day:2017-03-09
Information query
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