Invention Grant
US09570563B2 III-V compound and Germanium compound nanowire suspension with Germanium-containing release layer
有权
III-V化合物和锗复合纳米线悬浮液与含锗释放层
- Patent Title: III-V compound and Germanium compound nanowire suspension with Germanium-containing release layer
- Patent Title (中): III-V化合物和锗复合纳米线悬浮液与含锗释放层
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Application No.: US15181680Application Date: 2016-06-14
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Publication No.: US09570563B2Publication Date: 2017-02-14
- Inventor: Guy M. Cohen , Isaac Lauer , Alexander Reznicek , Jeffrey W. Sleight
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent David B. Woycechowsky
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/41 ; H01L21/8238 ; H01L29/06 ; H01L27/092 ; H01L29/417 ; H01L29/49 ; H01L29/775

Abstract:
A device that includes: a substrate layer; a first set of source/drain component(s) defining an nFET (n-type field-effect transistor) region; a second set of source/drain component(s) defining a pFET (p-type field-effect transistor) region; a first suspended nanowire, at least partially suspended over the substrate layer in the nFET region and made from III-V material; and a second suspended nanowire, at least partially suspended over the substrate layer in the pFET region and made from Germanium-containing material. In some embodiments, the first suspended nanowire and the second suspended nanowire are fabricated by adding appropriate nanowire layers on top of a Germanium-containing release layer, and then removing the Germanium-containing release layers so that the nanowires are suspended.
Public/Granted literature
- US20160284805A1 III-V COMPOUND AND GERMANIUM COMPOUND NANOWIRE SUSPENSION WITH GERMANIUM-CONTAINING RELEASE LAYER Public/Granted day:2016-09-29
Information query
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