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US09570579B2 Semiconductor structures and methods for multi-level work function 有权
半导体结构和多级功能的方法

Semiconductor structures and methods for multi-level work function
Abstract:
Semiconductor devices that each include a channel region and a gate stack are disclosed. The gate stack includes a gate insulator, a pair of spaced apart first metal gate layers, and a second metal gate layer. The gate insulator extends along the length of the channel region. The first metal gate layers have a first workfunction and extend from the gate insulator. The second metal gate layer is disposed between the first metal gate layers, has a second workfunction different from the first workfunction, and extends from the gate insulator. Methods of fabricating the gate stack are also disclosed.
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