Invention Grant
US09570694B2 All printed and transparent CNT TFT 有权
所有印刷和透明CNT TFT

  • Patent Title: All printed and transparent CNT TFT
  • Patent Title (中): 所有印刷和透明CNT TFT
  • Application No.: US14763791
    Application Date: 2014-01-27
  • Publication No.: US09570694B2
    Publication Date: 2017-02-14
  • Inventor: Farzam Sajed
  • Applicant: ANEEVE LLC
  • Applicant Address: US CA Torrance
  • Assignee: Aneeve LLC
  • Current Assignee: Aneeve LLC
  • Current Assignee Address: US CA Torrance
  • International Application: PCT/US2014/013238 WO 20140127
  • International Announcement: WO2014/117104 WO 20140731
  • Main IPC: H01L51/05
  • IPC: H01L51/05 H01L51/00 H01L51/10 H01L21/00
All printed and transparent CNT TFT
Abstract:
A transparent thin film transistor is fabricated on a substrate by first depositing a concentrated aqueous metallic carbon nanotube solution using an inkjet printer on the substrate to form source and drain electrodes with a channel therebetween. The deposited metallic carbon nanotubes are then cleaned in mild acid; and the source and drain electrodes are cured by heating. An aqueous semiconducting carbon nanotube solution is then deposited in the channel on the substrate using an inkjet printer on the substrate to form a channel semiconductor. The channel semiconductor is then cleaned using a mild acid. A dielectric gate of ionic gel dielectric is then deposited on the cleaned channel semiconductor using an inkjet printer; and the ionic gel dielectric is cured by heating.
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