Invention Grant
US09573319B2 Imprinting method and process for producing a member in which a mold contacts a pattern forming layer
有权
用于制造其中模具与图案形成层接触的构件的印刷方法和方法
- Patent Title: Imprinting method and process for producing a member in which a mold contacts a pattern forming layer
- Patent Title (中): 用于制造其中模具与图案形成层接触的构件的印刷方法和方法
-
Application No.: US12088340Application Date: 2008-02-05
-
Publication No.: US09573319B2Publication Date: 2017-02-21
- Inventor: Shingo Okushima , Nobuhito Suehira , Junichi Seki , Kazuyuki Kasumi
- Applicant: Shingo Okushima , Nobuhito Suehira , Junichi Seki , Kazuyuki Kasumi
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-027168 20070206; JP2007-050545 20070228
- International Application: PCT/JP2008/052219 WO 20080205
- International Announcement: WO2008/099795 WO 20080821
- Main IPC: B29C59/02
- IPC: B29C59/02 ; B29C59/00 ; B82Y10/00 ; B82Y40/00 ; G03F7/00 ; G03F9/00
Abstract:
An imprinting method in which alignment control of a mold and a substrate is effected and a pattern formed on the mold is transferred onto a pattern forming layer provided on the substrate. The imprinting method includes a step in which the mold and the substrate are brought near to each other while effecting the alignment control, after the alignment control is started, to bring the mold and the pattern forming layer into contact with each other, and then, the pattern forming layer is cured, and a step in which the gap between the mold and the substrate is increased, after the pattern forming layer is cured. Further, the alignment control is stopped after the alignment control is started, and at least one of before and after the mold contacts the pattern forming layer.
Public/Granted literature
- US20100270705A1 IMPRINT METHOD AND IMPRINT APPARATUS Public/Granted day:2010-10-28
Information query
