Invention Grant
- Patent Title: Method of bonding two substrates and device manufactured thereby
- Patent Title (中): 接合两个基板的方法和由此制造的装置
-
Application No.: US14361683Application Date: 2012-12-21
-
Publication No.: US09573804B2Publication Date: 2017-02-21
- Inventor: Ronny Van 'T Oever , Marko Theodoor Blom , Jeroen Haneveld , Johannes Oonk , Marinus Bernardus Olde Riekerink , Peter Tijssen , Hendrik Jan Hildebrand Tigelaar , Jean-Noël Fehr , Jean-Christophe Roulet , Amitava Gupta
- Applicant: Micronit Microfluidics B.V.
- Applicant Address: NL Enschede
- Assignee: Micronit Microfluidics B.V.
- Current Assignee: Micronit Microfluidics B.V.
- Current Assignee Address: NL Enschede
- Agency: Bozicevic, Field & Francis LLP
- Agent Rudy J. Ng; Bret E. Field
- Priority: EP11195720 20111223
- International Application: PCT/NL2012/050922 WO 20121221
- International Announcement: WO2013/095147 WO 20130627
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01L23/10 ; H01L21/50 ; B81C3/00 ; C23F1/02

Abstract:
The invention relates to method for bonding at least two substrates, for example made from glass, silicon, ceramic, aluminum, or boron, by using an intermediate thin film metal layer for providing the bonding, said method comprising the following steps of: a) providing said two substrates; b) depositing said thin film metal layer on at least a part of a surface of a first substrate of the two substrates; c) bringing a surface of the second substrate into contact with said thin film metal layer on said surface of the first substrate such that a bonding between the second substrate and the thin film metal layer on the first substrate is provided; and d) at least locally strengthening the bonding between the second substrate and the thin film metal layer on the first substrate. The invention also relates to a device comprising two substrates, for example made from glass, silicon, ceramic, aluminum, or boron, and an intermediate thin film metal layer.
Public/Granted literature
- US20140335301A1 Method of Bonding Two Substrates and Device Manufactured Thereby Public/Granted day:2014-11-13
Information query