Invention Grant
- Patent Title: Apparatus and method for monitoring and controlling thickness of a crystalline layer
- Patent Title (中): 用于监测和控制结晶层厚度的装置和方法
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Application No.: US14566085Application Date: 2014-12-10
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Publication No.: US09574285B2Publication Date: 2017-02-21
- Inventor: Frank Sinclair , Peter L. Kellerman
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B29/02
- IPC: C30B29/02 ; C30B15/26 ; C30B15/06 ; C30B29/06

Abstract:
An apparatus to monitor thickness of a crystalline sheet grown from a melt. The apparatus may include a process chamber configured to house the melt and crystalline sheet; an x-ray source disposed on a first side of the crystalline sheet and configured to deliver a first beam of x-rays that penetrate the crystalline sheet from a first surface to a second surface opposite the first surface, at a first angle of incidence with respect to the first surface; and an x-ray detector disposed on the first side of the crystalline sheet and configured to intercept a second beam of x-rays that are generated by reflection of the first beam of x-rays from the crystalline sheet at an angle of reflection with respect to the first surface, wherein a sum of the angle of incidence and the angle of reflection satisfies the equation λ=2d sin θ.
Public/Granted literature
- US20160168748A1 APPARATUS AND METHOD FOR MONITORING AND CONTROLLING THICKNESS OF A CRYSTALLINE LAYER Public/Granted day:2016-06-16
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